|
|
The FORTH-RITEŽ line of advanced analysis and control products focus state-of-the-art RF and impedance measurement technologies onto application specific solutions in the field of plasma-based manufacturing including network analysis, endpoint detection and closed-loop delivered power control. The foundation for all FORTH-RITEŽ solutions is the SENSE-RITEŽ measurement technology. With multiple patents issued and pending, SENSE-RITEŽ defines the state-of-the-art in RF voltage, current, phase and power measurement. By installing SENSE-RITEŽ at the RF power point-of-use, FORTH-RITEŽ has created integrated systems which address problems common to both plasma etch and deposition. Two versions of SENSE-RITEŽ are available - 5kW and 30kW. |
Best in Class Solutions from Quality Suppliers |